| Water Specifications
:
Water Quality Specifications for the Microelectronics
Industries :
| Item |
LCD(TFT) |
256 K DRAM |
1 M DRAM |
4 M DRAM |
16 M DRAM |
64 M DRAM |
| Line Width (µ) |
- |
1.4 - 1.8 |
0.8 - 1.0 |
0.4 - 0.6 |
0.2 - 0.3 |
0.1 |
| Resistivity Mohm @ 25°C |
18.0 |
17.5 |
18.0 |
18.0 |
18.1 |
18.1 |
| TOC (ppb) |
20 |
100 |
30 |
10 |
3 |
1 |
| Pacticles (no./ml) |
(0.1µ) 10/ml |
(0.2µ) 50/ml |
(0.1µ) 10/ml |
(0.05µ) 30/ml |
(0.03µ) 10/ml |
(0.03µ) 5/ml |
| Bacteria (CFU/ml) |
1/100 |
10/100 |
1/100 |
5/1000 |
5/1000 |
5/1000 |
| Dissolved Oxygen (ppb) |
50 |
100 |
100 |
50 |
5 |
3 |
| Silica (ppb) |
5 |
10 |
5 |
3 |
1 |
0.5 |
| Boron (ppb) |
- |
- |
2 |
0.05 |
0.05 |
0.05 |
| Sodium (ppb) |
0.1 |
0.2 |
0.1 |
0.1 |
0.05 |
0.01 |
| Potassium (ppb) |
0.1 |
0.3 |
0.1 |
0.1 |
0.05 |
0.02 |
| Zinc (ppb) |
0.05 |
0.1 |
0.05 |
0.05 |
0.02 |
0.02 |
| Iron (ppb) |
0.05 |
- |
0.05 |
0.05 |
0.02 |
0.02 |
| Copper (ppb) |
0.05 |
- |
0.05 |
0.05 |
0.005 |
0.005 |
| Chloride (ppb) |
0.1 |
0.2 |
0.1 |
0.1 |
0.02 |
0.02 |
| Bromide (ppb) |
- |
0.1 |
0.1 |
0.05 |
0.02 |
0.02 |
| Nitrate (ppb) |
- |
0.1 |
0.1 |
0.05 |
0.02 |
0.02 |
| Sulfate (ppb) |
- |
0.1 |
0.2 |
0.05 |
0.05 |
0.05 |
| Residue (ppb) |
- |
0.3 |
0.1 |
0.05 |
0.05 |
0.05 |
NCCLS / CAP Reagent Water Specifications
:
| Item |
Type I |
Type II |
| Resistivity Mohm @ 25°C |
10 |
1.0 |
| TOC (ppb) |
Not Required |
Not Specified |
| Silica (mg/L SiO2) |
0.05 |
0.1 |
| Particulates |
0.22 micron filter |
Not Specified |
| Bacteric (CFU/ml) |
10 |
1000 |
USP XXIV Purified Water Specifications:
| Conductivity (µS/cm) |
1.3 |
| TOC (ppb) |
500 |
| Bacteric (CFU/ml) |
<100 |
Remark: Chloride, Sulfate, Ammonia, Calcium, Carbon
Dioxide, Heavy Metals, and Total Solids requirements replaced
by conductivity measurement; Oxidizable substances requirement
replaced by TOC measurement
Frequently Asked Questions :
Q1: What is High Purity Water?
A1: For the purpose of manufacturing electronic
components, pure water means almost free of extraneous minerals,
particles, organisms, organics and dissolved gases. The
evolution of technology and the continuous quest for even
more advanced electronic products has almost pushed the
requirement for pure water to a limit. Water purity specified
by some semiconductor manufacturer has reached 99.999999999%.
In terms of mass, such a purity means various contaminant
levels in the range of a few tenths of trillion gram per
liter of water.
Q2: Why do I need High Purity Water for cleaning
and rinsing?
A2: In its pure state, water is one of the most
aggressive solvents (aqueous solution) known. Water, which
is called the "universal solvent", will dissolve
virtually everything exposed to it to a certain degree.
Q3: How can High Purity Water be produced?
A3: To High Purity Water, various treatment processes
are synergistically used which can be grouped under the
following categories:
1. Filtration
2. Membrane Separation
3. Ion Exchange
4. Degasification
5. UV Sterilization
6. UV Oxidation of Dissolved Organics
Q4: What is Ultrafiltration (UF)?
A4: Ultrafiltration is a pressure driven membrane
separation operation in which particulates, colloids, emulsified
oils, and macromolecules are separated from a liquid feed
stream upon passage through a porous semi-permeable membrane.
The separation is based primary on the size of the species
in the liquid relative to the size of the membrane pores.
Q5: How Ultrafiltration Membranes (UF) are rated?
A5: UF are rated on their ability to remove certain
sized molecules. The “size” of a molecule is roughly proportional
to its weight, and therefore the MWCO specified for an UF
indicates the minimum size (weight) of molecules that will
be removed by a particular UF device.
Q6: What is Osmosis?
A6: Osmosis is the passage of a liquid through
a semi-permeable membrane.
Q7: What is Reverse Osmosis (RO)?
A7: In osmosis, there is a tendency for liquid
to go from an area of less concentration to an area of more
concentration through a semi permeable membrane. This is
an osmotic flow. A semi permeable membrane is a membrane,
which allow one component of a solution to pass through
it and not the other. The osmosis continues, the level of
the concentrated solution rises until the pressure created
by Osmotic Head equals the Osmotic pressure created by the
different concentration of the two solutions. This is an
Osmotic Equilibrium. If pressure is applied to the concentrated
side, Reverse Osmosis will take place. The pressure causes
a flow through the semi permeable membrane into the diluted
solution as a result of the passage of water molecules through
the membrane while the mineral ions are rejected. The semi
permeable membrane acts as a barrier to ions and does not
allow them to pass through into the dilute solution. When
applied to water, this means that the product water has
a reduced total dissolved solids content.
Q8: How does water migrate through the Reverse
Osmosis Membranes ?
A8: The exact mechanism of the transport of water
across a semipermeable membrane is still subject to debate.
The type of membrane in use for water has pore sizes of
less than 0.05 micron with most of the pores probably in
the size range of 0.02 micron or less , i.e., 200 angstrom.
Since the pores will be lined with polar hydroxyl groups,
hydrated sites, and less polar acetate groups, the most
probably mechanism for the transport of water through the
membrane would appear to be the relatively low energy exchange
of water molecules from one polar group to another in the
pores involving diffusion type process. Hydrated ions, on
the other hand, bind water more strongly and would require
more exchange energy for the same process. Hydrated ions
therefore would move through the pores by a much slower
process.
Q9: What is Deionization ?
A9: Deionization is an ion exchange processes.
It uses certain types of synthetic resins in the proper
state and arrangements to remove most or all of the total
dissolved solids, in the form of ions, from water. Water
with ions taken out by ion exchange is deionized water,
or ion free water.
Q10: What is Ion Exchange ?
Ion exchange is the substitution of one kind of
positive ion for another. Or the substitution of one kind
of negative ion for another. We can call it Ion Trade.
A clearer definition might be: Ion exchange is the reversible
interchange of ions of similar electrical charge between
a solution and a solid insoluble body in contact with the
solution. The solid insoluble body is called an Ion Exchanger.
The most typical solution but by no means the only one is
water. The commonest ion exchanger is soil.
Q11: What are ions ?
A11: Sodium atoms react with chlorine atoms to
form sodium chloride (table salt). When table salt dissolved
in water, it ionizes. The sodium atom gives up an electron
and becomes a sodium ion with a positive electrical charge.
The chloride atom gains an electron and becomes chloride
ion with a negative electrical charge. Ions, then, are electrically
charged derivatives of atoms or groups of atoms, but are
neither atoms nor molecules. Some ions have positive electrical
charge; some have negative electrical charge. Ions of metal
have positive charge. Ions of non-metals have negative charge.
Hydrogen, a gas, can have either a positive or a negative
charge depending on the chemical compound of which it is
a component. Ions of only one type of charge cannot exist
by themselves. A positive ion must have a negative ion in
the immediate vicinity, and vice versa.
Q12: What are TDS ?
The letter TDS refer to Total Dissolved Solids
in water. Hardness minerals are only a part of the total
dissolved solids. TDS for ion exchange calculation is the
sum of the cations or the sum of the anions, depending on
which resins are being considered.
Q13: What is Regeneration ?
A13: Regeneration is the conversion of an ion exchange
resin to a desired ionic form. Regeneration involves the
passage of a regenerant containing high concentrations of
a desired ion through a resin bed to create an equilibrium
situation that favors removal of some portion (ideally most)
of the ions accumulated during the service run, leaving
the bed in an ions form that is again useful to the process.
The regenerant may be passed through the bed in the same
direction as the service flow (co-current regeneration)
or in the opposite direction from the service flow (counter-current
regeneration).
Q14: What is Electro-deionization (EDI) ?
A14: The EDI process employs an alternating arrangement
of anion and cation permeable membranes, between which mixed
bed ion exchange resin is sandwiched. Desired flow rates
are obtained by aligning numerous membranes/resin assemblies
(known as dilute spacers) hydraulically in parallel, and
electrically in series. Separating the dilute spacers and
forming the waste compartment are screen type concentrate
spacers. The combination of a dilute spacer and an adjacent
concentrate spacer is sometimes referred to as a cell pair.
By applying a DC electric potential across a stack of cell
pairs, ions move from one stream to another, effecting a
separation. Diluted product water is produced in one stream
(diluting stream) and concentrated waste water is produced
in the other (concentrating stream). As water flows down
the length of the diluting stream, cationic contaminants
first attached onto cation exchange resin beads. Under the
influence of the electrical field, these ions will migrate
through the resin in the direction of the negatively charged
cathode. Once the ions reach the cation permeable membrane,
they are pulled through into the concentrating stream. An
anion permeable membrane on the other side of that stream
prevents further migration, effectively trapping the cations
in the concentrating stream and allowing them to be flushed
to drain. The process for anion removal is similar, but
in the opposite direction, toward the positively charged
anode.
Q15: What is a Forced Draft Degasifier?
A15: The forced draft degasifier is a vertical,
cylindrical vessel containing essentially polypropylene
packing materials. Water entering at the top of the vessel
trickles downward while a blower located at the base forces
a counter-current air stream against the falling water.
The packing inside the vessel provide large free volume
to avoid pressure drop and sufficient surface contact area
for gas and liquid phase interface. Since carbon dioxide
is more soluble in the gas phase, the increasing gas-liquid
contact area results in the removal of the majority of the
carbon dioxide by the upward airflow.
Q16: What is Catalytic Oxygen Removal System (CORS)
?
A16: The catalytic oxygen removal system (CORS)
uses a palladium doped anion resin to catalyze the reduction
of dissolved oxygen in water or other solutions with either
hydrogen or hydrazine. The reaction takes place at ambient
temperatures and a pressure of approximately 100 psi. The
dissolved oxygen level can be reduced in a single pass from
the 6.0 to 8.0 ppm range down to less than 10 ppb, less
than 5 ppb, less than 1 ppb – depending on design. The reaction
by-products are water for hydrogen system and nitrogen for
hydrazine. The anion resins acts only as carrier for the
palladium catalyst and is not regenerated.
Q17: What is Membrane Contactor (Membrane Degasifier)
?
A17: Membrane contactors are devices, which can
be used to permit mass transfer between a gaseous phase
and a liquid phase of a materials without dispersing one
phase into another. The membrane contactors utilize a hydrophobic
porous membrane made of PP materials. The membrane material
is fabricated in the form of a hollow fibers which are bundled
together inside a SS outer shell. The hydrophobic porous
membrane acts as a support to prevent disperse of the water
while allowing the water to come to contact with the gas
phase. Vacuum is applied to reduce the partial pressure
of the gas phase. And as the partial pressure of the gases
on the gas phase is reduced the concentration of the gases
remain dissolved in the water is reduced in proportional
to the partial pressure.
Q18: What is Vacuum Degasifier?
A18: Vacuum Degasifier are typically tall columns
filled with packing or trays and are used to bring a liquid
phase in contact with a gas phase for the purpose of removing
dissolved gases from the liquid. The liquid runs from the
top of the column down around the packing. The packing creates
a large surface area for the gas phase to contact the liquid
phase.
Q19: What is Ultraviolet Light?
A19: Ultraviolet light is a form of electromagnetic
or radian energy, radian travels, in the form of waves,
in straight line paths and in all directions from its source.
The wave lengths range from very long radio waves to very
short X-rays. The most familiar part of the spectrum is
a narrow band of wavelengths visible to the human eye. Another
band with wavelengths shorter than those of visible light,
and not visible to the eye, is the ultraviolet part of the
spectrum. Ultraviolet radiation can cause changes in living
matter. When applied to microorganism, it causes changes
to the DNA of the microorganism rendering them unable to
multiply.
Q20: What is a Ultraviolet Lamp?
A20: Ultraviolet lamp works on the following principles:
An electric arc is struck through an inert gas carrier (usually
proprietary), in a sealed special glass tube. Heating from
the arc cause vaporization of the small amount of mercury
contained in the sealed tube. The mercury when vaporized
becomes ionized and in the electric arc gives off UV radiation.
Q21: What is Validation?
A21: Establishing documented evidence which
provides a high degree of assurance that a specific process
will consistently produce a product meeting its pre-determined
specifications and quality attributes.
Q22: What is Validation Protocol?
A22: A written plan stating how validation will
be implemented including test parameters, product characteristics,
product equipment, and decision points on what constitutes
acceptable test results.
Q23: Why Process Validation is necessary?
A23: Process validation is required, in both general
and specific terms, by the Current Good Manufacturing Practice
Regulations for Finished Pharmaceuticals, 21 CFR Part 210
and 211, and of the Good Manufacturing Practices Regulations
for Medical Devices, 21 CFR Part 820, and therefore, is
applicable to the manufacture of Pharmaceuticals and medical
devices.
Q24: What is Validation Master Plan (VMP)?
A24: Validation Master Plan is a document that
describes the approach and methods to be used during the
entire validation effort. The master validation plan is
the SOP for the entire validation.
Q25: What is Installation Qualification (IQ)?
A25: Installation qualification (IQ) is a protocol
to check that the equipment, pipe, and instrumentation are
installed properly and in accordance with the design documents.
Q26: What is Operational Qualification (OQ)?
A26: Operational Qualification (OQ) is a protocol
designed to ensure that the various equipment operates as
designed. This protocol includes instrument calibrations,
flow rates, pump rotation, and other system factors.
Q27: What is Performance Qualification (PQ)?
A27: Performance Qualification (PQ) measures the
system’s overall performance to establish its level of control.
The PQ will consist of samples that are taken and tested
against the United States Pharmacopoeia (USP) monograph
tests and other internal standards.
Q28: What is Standard Operating Procedures(SOPs)?
A28: OSHA’s Laboratory Standard (29 CFR 1910,1450)
requires that all Standard Operating Procedures include
health and safety information. An SOP is a written procedure
that all workers must follow when performing a routine laboratory
task. Most SOPs detail the steps of an operation in the
order in which they should be performed.
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